The concept of the family of MEMS and nano-devices for ultra high precision measurments of an angle, rotation, alignment, translation, frequency and acceleration will be described. The devices are based on quantum tunnelling current between two or more quasi-1-dimensional conductors placed on two atomically flat substrates which are brought together at distances of the order of nanometers. The lateral rotation of one plane with respect to another, with interplanar separation kept constant produces linear changes in the tunnelling current for small angles. This is in striking difference to exponential dependance of the tunnelling current on the vertical interplanar separation. The possible implementations of the devices using the current state-of-the-art semiconductor fabrication technologies and future embodiments relying on manipulation of nanotubes on the vicinal crystal surfaces will be outlined.