If only some of these parts can be made via mechanosynthesis, the technology won’t be science-fiction revolutionary. What R.Freitas et al. are computer modelling right now are tool-tip structures and recharge metabolisms. No idea how to build them, but the results suggest slowly building a diamond lattice will be doable. IDK much about “lasers”, but I’d guess you need Yttrium-doped (or some other laser-ly atom) diamond computer simulations to know if this AFM part is a potential mechanosynthesis component; depositing Yttrium on a diamond lattice. An innovation may be to use a Boron-doped diamond comb-drive in place of PZT as an SPM actuator. This might be easier to make using CVD; I don’t know anything about electrical engineering, but if computer simulations demonstrate mechanosynthesizing boron atoms on a diamond lattice is feasible…given that CNTs yield one degree of dimension, by the time this comb-drive could be ready in a decade or two, there may already be fullerene-based actuators (A.Zettl’s type of research) on the market.
I’m not even going to hazard incorporating the UHV filter into the proto-SPM. Whatever the smallest UHV filter is at any given time may restrict the miniaturization of a proto-SPM. I’m going to magically assume the semiconductors (Intel, Sun) will work with tiny diamond-containers encapsulating tiny UHV chambers for some aspect of their manufacturing process, and that diamond surface chemists will be able to purchase these square micron “SPM shells”. It is about as hopeful as is E.Drexler’s eutactic ferris wheel filter.

Anyway, I’m envisioning a few *specific* but potentially impossible-in-practise scientific experiments from which to forward and backward chain some sort of overall diamond manufacturing process. Here is one that may not work: Somehow, a very specific carbon nanohorn topography is made. There is a paper (I can’t find at the moment) that computer simulates a specific polymantane barely slipping into a specific SWCNT. It also notes a slightly narrower SWCNT (without endcap) could “touch” the polymantane molecule with its edges, in effect using London Forces as a grip. Somehow, this diameter of CNT is incorporated into a nanohorn. So what you get is a pylon-shaped carbon allotrope incorporating a single open volume. I’ve no idea how to manufacture this shape (electron “soldering” from the outside of a cut nanohorn and the open end of a CNT?). But the shape is key, in that I’m hoping it can be used to guide both the smaller CNT, now used as an SPM tool-tip (demonstrated, again no link for now) into the interior of the larger CNT, and that the open end of the allotrope can be attached to a centrifuge and used to incorporate polymantane molecules into the interior of the allotrope (ie. the capped CNT end, not the open shell surface).
Then, the filled nanohorn would be taken off the centrifuge and mounted onto an SPM. Here, the inner CNT forms the SPM tool-tip which would hopefully be guided into the allotrope to extract one of the column of polymantane reservoir molecules. That’s basically it. I’ve no idea if a centrifuge would work to force polymantanes into the end of a novel nanohorn. There is much backwards chaining to manufacture or find such a useful allotrope. But the really ambitious part is using a polymantane in CNT to form diamond tool-tips! I’m envisioning somehow affixing a reactive moiety to the SPM’s CNT tip and introducing it to the allotrope interior to remove a hydrogen atom(s) from the polymantane’s surface. Then, again somehow, introducing a carbon dimer to the polymantane ion’s reactive surface to build up a polymantane. If getting the carbon atom to the polymantne ion requires a large diameter moecule on the SPM CNT, this might be overcome by “filling up” the allotrope’s CNT-end with polymantanes and using the junction of the allotrope’s CNT end and wide end as the reaction site, though perhaps there would still be steric hinderance issues. As the product polymantane molecule becomes bigger, “fit” it into progressively larger allotrope containers until the desired R.Freitas tool-tip is produced. Maybe the polymantane would recontruct into an unreactive DLC surface where a hydrogen atom is removed? IDK.

Even given mature MNT, it would be tough to produce products cost effectively. The obvious is computer circuits, but in two decades CNT diodes may be ubiquitous already. Big lasers and space infrastructures, for sure. But those are massive.